薄膜光学-基础讲义.ppt

1,R& D dept. /Andy Yu,Fundamentals Of Optical Coating & Application,2,Newton(1666年) -光的微粒說(Corpuscular theory),光是由發光物體發射出來的,以非常微小的粒子做高速運動 用微粒說解釋光在均勻介質中的直線傳播,光在界面上的反射,折射;確無法解釋光的繞射,干涉,偏振現象,Huygens(1679年)-波動說(wave theory),光是在整個空間介質ether中傳播的某種彈性波,用波動說解釋光的傳播速度;用波動說推出反射定律與折射定律,並解釋方解石的雙折射現象,發現了光的偏振現象,Young(1801年)-楊氏雙狹縫干涉實驗,出現明暗相間的條紋(微粒說無法解釋) (波動說確可圓滿解釋),光是甚麼?,3,S,S1,S2,M,r1,r2,D,P,x,O,=r2-r1 (波程差) d sin=(2k-1)/2,d,(相差 ) =2/=2k k=0,1,2,3,兩束光在P點振幅最大,形成明亮條紋,(相差 ) =2/=(2k-1) k=0,1,2,3,兩束光在P點振幅最小,形成暗紋,楊氏雙狹縫干涉,4,光的干涉,Constructive interference, R increased,Destructive interference, R decreased,兩列頻率,振幅及振動方向相同,但傳播方向相反的波,疊加形成駐波(Standing Wave),對光波來說,滿足一定條件的兩束光疊加時,在疊加區域,光的強度或明暗有一穩定分佈,5,RF,Video Frequency,Micro Wave,Infra Red,Visible,UV,X-Ray,-Ray,/Hz,/m,104,108,1012,1016,1020,3104,3100,310-4,310-8,310-12,400760nm 1014 1015 Hz,760nm6 104nm 1012 1014 Hz,電磁波譜,6,薄膜光學 (Thin Film Optics),光學薄膜是一種用於改變光波傳遞特性的光學元件,光學薄膜是由特定光學常數和厚度的分層介質所組成,薄膜光學的理論基礎是干涉光學(Interference),光束將在每一個界面 上多次反射,因此涉及到大量光束疊加問題;有效的計算方法: (1)矩陣法 (2)等效導納遞推法-將所有膜層等效成一個界面,用總的反射反射係數和位相來表示 理想的光學薄膜:,(1) 光學薄膜層與層之間相互平行 (2) 介面光滑且界線分明,7,a,ar,atrt,Atr3t,Atr5t,Atr7t,atr,Atr3,Atr5,Atr7,at,Atr2,Atr4,Atr6,d,att,Attr2,Attr4,Attr6,1,2,3,4,5,1,2,3,4,薄膜干涉,透射光振幅,反射光振幅,炫麗的彩色膜,因薄膜的兩個表面反射光互相干涉而產生的,8,Optical Admittance Y(光導納)=H/E(電磁波的磁場與電場之比) Y=N Yo=(n-ik) Yo Yo (自由空間之導納),單層光學薄膜的特徵矩陣:,cos i sin /Y iY sin cos ,I=,-1,(相厚度 phase thickness)=2 nd cos/ D=膜層的幾何厚度,Ea Ha,=,Eb Hb,薄膜的特徵矩陣,9,cos i sin /N iN sin cos ,B C,=,1 Ns,Quarter wave (1/4)o = /2,M=,0 i/N iN 0,Half wave (1/2)o = ,1 0 0 1,M=,Absentee layer,Y(光導納)=H/E(電磁波的磁場與電場之比)=C/B,1 Ns,NE=C/B= N2/Ns,1 Ns,10,Equivalent admittance(等效導納)YE=C/B B和C分別正比於電場(E)及磁場(B),反射光振幅 (amplitude of reflection coefficient) =Er/Ei =(Y0-Y1 ) /(Y0+Y1 ) = (N0-N1 ) / (N0+N1 ),反射率 R= = (Y0-Y1/Y0+Y1 )2 R=(N0-N1 ) / (N0+N1 ) 2,(Er/Ei ;反射強度與入射強度之比),For dielectric Ns=ns e.g BK7 ns=1.52 R=(n0-n1 ) / (n0+n1 ) 2=4.26%,For metal Ns=ns-iks Ns=0.82-i5.99 550nm R=(n0-n1 ) 2+k 2 / (n0+n1 ) 2+k 2 ) =91.6%,11,穿透光振幅 (amplitude of transmission coefficient),穿透率T=4 0 s / ( 0 B + C) ( 0 B + C),=Et/Ei =2Y0 /(Y0+Y1 ) =2 N0/ (N0+N1 ) =20 / 0 B + C,T=4 n0 n s /(n0 +n s )2,1 = T + R +L(S+A),12,n1,n2,n3,n1-n2,n1+n2,n2-n3,n2+n3,=,Single Layer ARC,若薄膜的兩個表面光振幅相等,相位相反,則兩反射光相互抵消,透射光就增強了,n2 = (n1n3)1/2,n1 =1, n3 =1.5,n2=1.225,13,y0,y1,y21/ysub,ysub,Without ARC R=(y0-ys ) / (y0+ys ) 2 BK7=1.52 =(1-1.52)/1+1.52) 2 =4.26%,Without ARC,14,Single Layer ARC R=(y0-y12/ysub)/ (y0+y12/ysub)2 Idea ARC ,R=0, y0-y12/ysub=0, y1=(y0ysub)1/2 y0 =1.0 Air, ysub =1.52 y1 =1.23,R=(y0-y2f/ys)/ (y0+y2f/ys)2 R=(1.00-1.382/1.52)/ (1.00+1.382/1.52) R=1.23%,15,yH=y5,yH=y3,yH=y1,yL=y4,yL=y2,y2Hy2Hy2H y2Ly2Lysub,yo,ysub,Y1=y2H/ y sub,Y2=y2L/ Y1 = y2L ys/y2H,Y3=y2H/ Y2 = y4H/ y2Lys,y21y23y25 y22y24ys,Odd layer,y0yE y0yE,=,等效導納(遞推法),16,nair,nL,nH,nS,1,2,3,Nair,nL nH,光疏介質進入光密介質;相位變化為,1,2,3,合向量,2-Layer ARC,nHns 光密介質進入光疏介質; 相位沒有變化,HL雙層減反射膜,反射率可降至0.05%以下,17,2.352,1.452,1,2,1.52,N=1.38,n=2.2,0.5,0,1.522+2.22,21.52,1+1.382,2 1,圓心2.352=,圓心1.452=,通過(1.52,0),通過(1,0),導納軌跡圖,18,ARC with Two Layer R=(y0-y12ysub/y22)/ (y0+y12 ysub/y22) Idea ARC R=0, y0- y12ysub/y22 =0; y12/y22=y0/ ysub Y2=y1 (ys/y0) 1/2=(1.38 1.23) 1/2 y2=1.7,R=(y0-y12ysub/y22)/ (y0+y12 ysub/y22) R=(1.00-1.382 1.52/1.72)/ (1.00+ 1.382 1.52/1.72) =(1-1.00162) /(1+1.00162) =0.81%,19,High Reflected Mirror,20,High Reflection Mirror,ys/HLHLHLHLH.H/ y0= ys/ (HL)PH/ y0,yE =yH 2(p+1) /= yL 2p ys,R= (y0 -yE / y0+ yE ) 2,ys =1.52, yH =2.3,yL=1.46,yo=1 ,p=8 R=?,99.92%,g=4/Sin-1(yH - yL/yH + yL) G=0/ = g/g=170nm,21,High Reflection Mirror,22,High Reflection Mirror,23,S 分量,P分量,稜鏡偏振鏡:1.65/(HL)5 H/1.65 0=500nm,=45,24,25,W=R+G+B M=R+B Y=R+G C=G+B,C=W-R Y=W-B M=W-G,Color(加法三原色),26,Color(減法三原色 ),C*Y*M=BL R=Y*M G=Y*C B=M*C,27,Dichroic Mirror,28,COLOR：,RED Wavelength 50%：632nm,YELLOW Wavelength 50%：530nm,Color Filter,29,COLOR：GREEN Wavelength 50%：494/554nm,BLUE Wavelength 50%：515nm,30,COLOLIGHT BLUE Wavelength 50%：546nm,PURPLE Wavelength 50%：469/644nm,31,COLPINK Wavelength 50% 452/621nm,COLOR：LIGHT PINK Wavelength 50%：487/578nm,32,Incident Ray,Reflected Ray,Refracted or Transmitted Ray,S,S,S,P,P,P,Surface,Ns = cos Np= /cos ,Oblique incidence,1,0,0, Is given by Snells law,P偏振光(TE偏振光)-電場平行於入射平面的偏振光,S偏振光(TM偏振光)-電場垂直於入射平面的偏振光,33,Rs,Tp,=45,n0,nH,nL,nH,nL,n0,n0,n0,MacNeille PBS,H,H,L,PBS偏振分光鏡,隨入射角增加,P偏振光高低折射率比nH/ nL愈來愈小,S偏振光高低折射率比愈來愈大,造成/4膜堆P偏振光和S偏振光之高反射區,使P偏振光愈來愈窄S偏振光愈來愈寬;出現S偏振光R很大P偏振光R很小的波域,34,利用 Brewster angle B ,RP=0 , P偏振光之反射為0,H =nH/cos H= L =nL/cos L,Sin2 H=nL2/(nH+nL), tan H = nL/ nH,nHsin H=nLsin L,依 Snells law,當Prism AOI=45, sin H=ngsin 45 / nH,ng2=2nH2nL2/ (nH2 +nL2),PBS偏振分光鏡,35,36,PBS Range:430nm490nm Ts85% AOI :45degree,37,PBS Range:600nm670nm Ts89% AOI :45degree,38,What are Optical Thin film can do for an optical system,(1)Reduce reflectance or increase transmittance,(2) Increase reflectance reduce transmittance,(3)Acts as a beam splitter: Neutral beam splitter Dichroic Beam Splitter Polarizer(P-polar light& S- -polar light separation),(4)Spectral Band pass filter(WDM),(5)Long Pass(Cold-Light Mirror) & Short Pass Filter(Hot Mirror),39,(6)Energy Control(Solar energy,Absorber) (7)Phase control (8) Wave guiding(Integrated optics) (9)Optical compensation(Photograph used filter) (10)Anticounterfeiting (11)Display (Color reflector) (12)Transparent Conductive(ITO) (13)Decoration (UV&IR sunglasses,window illumination),40,其它熱門鍍膜產品,(1)UV ARC&UV High Transmission film,(2)Rugate Filter,(3)Gradient Index Film,(4)Mosaic Filter,(5)Diamond Like Carbon Film,(6)X-Ray multi-film,41,投影顯示器用各式分合色片 Dichroic Mirror R. G. B.分合色用 適用不同角度分色 適用 S 或 P 偏極 穿透區平均穿透率 95% 反射區平均反射率 99% Gradient Dichroic Mirror R. G. B. 分合色用 適用不同角度分色 梯度可調整從 0.1nm / 1mm 到 1nm / 1mm 適用S或P偏極 穿透區平均穿透率95% 反射區平均反射率99% 窄波域反射mirror 適用於 R.G.B. 各區 適用不同角度 適用各種偏極 平均反射率99% 寬波域反射mirror 適用於可見光區 適用不同角度 適用各種偏極 平均反射率99%,42,43,(1)多層減反射膜,(2)截止濾光片,(3)減色濾光片,(4)條帶彩色濾光片,(5)增加熱負載之雙色鏡,(6)非偏振介質分光鏡,(7)非偏振截止濾光片,(8)位相控制鍍膜,(9)低耗損雷射鏡,(10)塑膠減反射膜,(11)可見光及紅外線雙波減反射膜,性能靈敏度較高鍍膜(價位高),(12)寬帶熱線反射鏡,(13)低發射率鍍膜,44,價格靈敏度較高鍍膜(價位低),前表面反射鏡,熱線及冷光鏡,人造珠寶,太陽眼鏡鍍膜,顯像器之防炫膜,防仿造鍍膜,建築玻璃鍍膜,45,光學相關薄膜 PC 太陽眼鏡彩色鍍膜 7 種顏色 (金黃、紫、紅寶石、藍、橘、翡翠、大紅) MIL-M13508 附著性測試及 DIN 58196 鹽水煮沸測試 PMMA 鏡片抗反射鍍膜 硬氧化膜 平均反射率1.5% MIL-M13508 附著性測試 同相位分光鏡 穿透率 = 50 / 50 反射率 = 70 / 30 雙色濾光鏡 穿透率 90% 阻光率 5%； 過渡波域 10nm 近紅外穿透鏡 0.40.75m 平均穿透率 0.05% 0.81.60m 平均穿透率 95% 玻璃基材可見光域穿透增強膜系 0.40.75m 穿透率 98.5% R.G.B. 彩色濾光鏡 CIE 色座標規格誤差：X， Y0.01,46,鋁反射鏡 0.3m0.8m, 反射率90% 熱鏡 具備多層膜系保護膜 0.7m2.5m, 反射率95% 0.35m0.65m, 反射率 2.0% 冷光鏡 0.35m反射率 2.0% 光纖衰減器鍍膜 SiO2TiO2保護膜 金屬 / 介質結構 於1.3m， 反射率 0.5%， 穿透率=50%,47,導電塑膠及玻璃鍍膜 適用於 LCD 用之 ITO 鍍膜 採用低溫 (85% 阻抗值：50 / cm2 適用於大面積基板 ( PET：直徑1m； glass：0.25m2 ) WDM 濾光片鍍膜 膜層堆疊：全氧化介質多層膜 100GHz產品規格 200GHz 產品規格波長範圍：C-Band&L-Bband,S-Band CWDM WWDM BPF,48,電腦護目鏡 鏡片大小 14“21“ 反射率：平均 0.60.4% (430640nm) 電磁輻射干擾： 113% (10500KHz) 靜電防護：可 截紫外線：可 耐刮傷測試：滿足 MIL-C-675C,49,It transmits the UV rays and reflects the visible to make special fluorescent effects. Application：Fluorescent effects for lighting and stage,Ultraviolet Transmission Filter,50,Ultraviolet Blocking Filters is to transmit much of the visible and infrared. At the same time, efficiently reflecting the ultraviolet region of the spectrum. It is normally used to block the ultraviolet from the visible and near infrared. It also enables the use of a broader range of light sources and reduces pho